Himeji Rika Co., Ltd. is exhibited Vacuum Plane Heating Unit at SEMICON Japan 2022.
website：https://www.himejirika.co.jp/
This time, I would like to introduce this vacuum heating unit.
Here, 15 halogen heaters can be independently controlled one by one, and this one can heat evenly by pulling a vacuum.
Here, 15 halogen heaters can be independently controlled one by one, and this one can heat evenly by pulling a vacuum.
It is said that a patent has been applied for here, but one of the features is that the lead wire is outside the chamber.
So when you use this, the feature is that you can heat things evenly.
